

IEC 62047-30-2017 半导体器件--微机电装置--第30部分:微机电系统压电薄膜的机电转换性能的测量方法 Semiconductor devices – Micro-electromechanical devices – Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
- 标准类别:
- 标准大小:
- 标准编号:IEC 62047-30-2017
- 标准状态:现行
- 更新时间:2023-11-11
- 下载次数:次
This part of IEC 62047 specifies measuring methods of electro-mechanical conversion characteristics of piezoelectric thin film used for micro sensors and micro actuators, and its reporting schema to determine the characteristic parameters for consumer, industry or any other applications of piezoelectric devices. This document applies to piezoelectric thin films fabricated by MEMS process.dition 1.0 2017-09 INTERNATIONAL STANDARD colour inside Semiconductor devices – Micro-electromechanical devices – Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film IEC 62047-30:2017-09(en) THIS PUBLICATION IS COPYRIGHT PROTECTED Copyright ? 2017 IEC, Geneva, Switzerland All rights reserved. Unless otherwise specified, no part of this publi
-
GB 30871-2022免费下载危险化学品企业特殊作业安全规范 2023-11-11
-
GB/T 706-2016热轧型钢 2023-11-11
-
GB/T 1094.1-2013电力变压器 第1部分:总则 2023-11-11
-
JB/T 10216-2013电控配电用电缆桥架 2023-11-11
-
GB 9706.1-2020医用电气设备 第1部分:基本安全和基本性能的通用要求 2023-11-11
-
GB/T 10801.2-2018绝热用挤塑聚苯乙烯泡沫塑料(XPS) 2023-11-11
-
GB/T 13663.2-2018给水用聚乙烯(PE)管道系统 第2部分:管材 2023-11-11
-
GB 51251-2017建筑防烟排烟系统技术标准 2023-11-11