ISO/TS 20175-2018 真空技术--真空计--四极质谱计的分压测量 Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement

1 Scope This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass- to-charge ratios m/z < 300.
This document is not applicable to QMSs with other ion sources, such as chemical ionization, photo- ionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials.
It is well known from published investigations on the metrological characteristics of quadrupole mass spectrometers that their indications of partial pressures depend significantly on the settings of the instrument, the total pressure, and the composition of the gas mixture. For this reason, it is not possible to calibrate a quadrupole mass spectrometer for all possible kinds of use. The characterization procedures described in this document cover the applications of continuous leak monitoring of a vacuum system, leak rate measurement with tracer gas, residual gas analysis and outgassing rate measurements. The user can select that characterization procedure that best suits his or her needs. These characterization procedures can also be useful for other applications.